Automated Alignment Cs Correction System for STEM (I): Design and Verification of Automated Alignment System
نویسنده
چکیده
A sub-angstrom probe size has been achieved with a Cs corrector [1, 2] for a scanning transmission electron microscope (STEM). In general, in the alignment of the Cs corrector, a user needs to select the aberration that needs to be corrected on the basis of aberration measurements. Once wrong selection of aberrations to be corrected is executed, the number of measurements and corrections is increased. Therefore, an automated alignment system that does not require user operation is desired.
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